# A CNN-Based CMP Planarization Model Considering LDE Effect

> Research article (IEEE Transactions on Components Packaging and Manufacturing Technology, 2020) · cited 20× · AI/ML

**Wikidata**: [openalex:W3010776687](https://www.wikidata.org/wiki/openalex:W3010776687)  
**Source**: https://4ort.xyz/entity/a-cnn-based-cmp-planarization-model-considering-lde-effect