# A Clustering-Based Equipment Condition Model of Chemical Vapor Deposition Process

> Research article (International Journal of Precision Engineering and Manufacturing, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2954619133](https://www.wikidata.org/wiki/openalex:W2954619133)  
**Source**: https://4ort.xyz/entity/a-clustering-based-equipment-condition-model-of-chemical-vapor-deposition-process