# A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die

> Research article (Journal of Microelectromechanical Systems, 2015) · cited 79× · AI/ML

**Wikidata**: [openalex:W1630602315](https://www.wikidata.org/wiki/openalex:W1630602315)  
**Source**: https://4ort.xyz/entity/a-bulk-micromachined-three-axis-capacitive-mems-accelerometer-on-a-single-die