# A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

> Research article (Mechanical Systems and Signal Processing, 2021) · cited 19× · AI/ML

**Wikidata**: [openalex:W3119816846](https://www.wikidata.org/wiki/openalex:W3119816846)  
**Source**: https://4ort.xyz/entity/a-3-dof-piezoelectric-driven-nanopositioner-design-control-and-experiment