# A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

> Research article (IEEE Journal of Solid-State Circuits, 2020) · cited 38× · AI/ML

**Wikidata**: [openalex:W3024162427](https://www.wikidata.org/wiki/openalex:W3024162427)  
**Source**: https://4ort.xyz/entity/a-22-ng-surd-hz-17-mw-capacitive-mems-accelerometer-with-electrically-separated-mass-structure-and-digital-noise-reducti