# A 10 mW, 0.4 $\mu \text{g}/\surd $ Hz, 700 Hz $\Sigma \Delta $ High-Order Electromechanical Modulator for a High-Q Micromechanical Capacitive Accelerometer

> Research article (IEEE Sensors Journal, 2017) · cited 21× · AI/ML

**Wikidata**: [openalex:W2784133938](https://www.wikidata.org/wiki/openalex:W2784133938)  
**Source**: https://4ort.xyz/entity/a-10-mw-0-4-mu-text-g-surd-hz-700-hz-sigma-delta-high-order-electromechanical-modulator-for-a-high-q-micromechanical-cap