# 65 nm lithography process

> semiconductor manufacturing processes with a 65 nm MOSFET technology node

**Wikidata**: [Q869122](https://www.wikidata.org/wiki/Q869122)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/65_nm_process)  
**Source**: https://4ort.xyz/entity/65-nm-lithography-process


## References

1. [TSMC](http://www.tsmc.com/english/dedicatedFoundry/technology/65nm.htm)
2. [GlobalFoundries](http://marcomauto.globalfoundries.com/acton/attachment/8470/f-0017/1/-/-/-/-/PB-RF-CMOS-130nm-28nm-Solutions.pdf)
3. [GlobalFoundries](http://marcomauto.globalfoundries.com/acton/attachment/8470/f-000d/1/-/-/-/-/PB-55-65nm-LPe-RF-Technology.pdf)
4. Freebase Data Dumps. 2013