# 5 nm lithography process

> semiconductor manufacturing processes with a 5 nm FinFET technology node

**Wikidata**: [Q4641190](https://www.wikidata.org/wiki/Q4641190)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/5_nm_process)  
**Source**: https://4ort.xyz/entity/5-nm-lithography-process