# 45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films

> Research article (SID Symposium Digest of Technical Papers, 2015) · cited 23× · AI/ML

**Wikidata**: [openalex:W2133871839](https://www.wikidata.org/wiki/openalex:W2133871839)  
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