# 3D Super-Resolution Optical Profiling Using Microsphere Enhanced Mirau Interferometry

> Research article (Scientific Reports, 2017) · cited 91× · AI/ML

**Wikidata**: [openalex:W2626613615](https://www.wikidata.org/wiki/openalex:W2626613615)  
**Source**: https://4ort.xyz/entity/3d-super-resolution-optical-profiling-using-microsphere-enhanced-mirau-interferometry