# 3D Defect Detection and Metrology of HBMs using Semi-Supervised Deep Learning

> Research article (2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), 2023) · cited 11× · AI/ML

**Wikidata**: [openalex:W4385525284](https://www.wikidata.org/wiki/openalex:W4385525284)  
**Source**: https://4ort.xyz/entity/3d-defect-detection-and-metrology-of-hbms-using-semi-supervised-deep-learning