# 30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film

> Research article (Acta Materialia, 2017) · cited 69× · AI/ML

**Wikidata**: [openalex:W2770055970](https://www.wikidata.org/wiki/openalex:W2770055970)  
**Source**: https://4ort.xyz/entity/30-nm-x-ray-focusing-correlates-oscillatory-stress-texture-and-structural-defect-gradients-across-multilayered-tin-siox-