# 3 nm lithography process

> semiconductor manufacturing processes with a 3 nm GAAFET technology node

**Wikidata**: [Q63207578](https://www.wikidata.org/wiki/Q63207578)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/3_nm_process)  
**Source**: https://4ort.xyz/entity/3-nm-lithography-process