# 3-Axis fully-integrated surface-mountable differential capacitive tactile sensor by CMOS flip-bonding

> Research article (2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016) · cited 13× · AI/ML

**Wikidata**: [openalex:W2290157520](https://www.wikidata.org/wiki/openalex:W2290157520)  
**Source**: https://4ort.xyz/entity/3-axis-fully-integrated-surface-mountable-differential-capacitive-tactile-sensor-by-cmos-flip-bonding