# 3-axis all elastomer MEMS tactile sensor

> Research article (2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2016164457](https://www.wikidata.org/wiki/openalex:W2016164457)  
**Source**: https://4ort.xyz/entity/3-axis-all-elastomer-mems-tactile-sensor