# 1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

> Research article (2022 International Conference on Control, Automation and Diagnosis (ICCAD), 2022) · cited 14× · AI/ML

**Wikidata**: [openalex:W4293093507](https://www.wikidata.org/wiki/openalex:W4293093507)  
**Source**: https://4ort.xyz/entity/1d-resnet-for-fault-detection-and-classification-on-sensor-data-in-semiconductor-manufacturing