# 14 nm lithography process

> semiconductor manufacturing processes with a 14 nm FinFET technology node

**Wikidata**: [Q2750603](https://www.wikidata.org/wiki/Q2750603)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/14_nm_process)  
**Source**: https://4ort.xyz/entity/14-nm-lithography-process


## References

1. [GlobalFoundries](http://www.globalfoundries.com/technology-solutions/leading-edge-technology/14-lpe-lpp)
2. [GlobalFoundries](http://marcomauto.globalfoundries.com/acton/attachment/8470/f-0014/1/-/-/-/-/PB-FX-14-ASIC.pdf)
3. Freebase Data Dumps. 2013