# 1.5 µm lithography process

> semiconductor manufacturing processes with a 1.5 µm MOSFET technology node

**Wikidata**: [Q1135912](https://www.wikidata.org/wiki/Q1135912)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/1.5_μm_process)  
**Source**: https://4ort.xyz/entity/1-5-m-lithography-process


## References

1. Freebase Data Dumps. 2013