# 0.33 NA EUV systems for high-volume manufacturing

> Research article (Optical and EUV Nanolithography XXXV, 2022) · cited 10× · AI/ML

**Wikidata**: [openalex:W4281558753](https://www.wikidata.org/wiki/openalex:W4281558753)  
**Source**: https://4ort.xyz/entity/0-33-na-euv-systems-for-high-volume-manufacturing